Alexandria Digital Research Library

Athermal laser designs on Si and heterogeneous III-V/Si 3N4 integration

Author:
Bovington, Jock Trevor
Degree Grantor:
University of California, Santa Barbara. Electrical & Computer Engineering
Degree Supervisor:
John E. Bowers
Place of Publication:
[Santa Barbara, Calif.]
Publisher:
University of California, Santa Barbara
Creation Date:
2014
Issued Date:
2014
Topics:
Engineering, Electronics and Electrical
Keywords:
Athermal
Silicon Photonics
TiO2
Photonic Integration
Lasers
Bonding
Genres:
Dissertations, Academic and Online resources
Dissertation:
Ph.D.--University of California, Santa Barbara, 2014
Description:

This dissertation presents each component of and a path towards heterogeneously integrated GaAs type III-V lasers bonded to Si3N4 passive waveguides on silicon, targeting visible integrated photonics on silicon. A continuous-wave Fabry-Perot laser, tapered mode converters from III-V to Si3N4, and Si3N4 sidewall distributed Bragg reflector elements, all made with an integrable process flow, are demonstrated to prove this principle. The goal of this integration is to combine electrically pumped InGaAs multiple quantum well (MQW) active material with low-loss, spectrally wide-bandwidth waveguides to enable compact, novel photonic integrated circuits.

An additional benefit with Si3N4 is its lower thermal drift relative to silicon. Additionally, demonstrations of TiO2 based guides with ~ pm/K thermal drift are presented to explore the possibilities of athermalized waveguides on silicon. Both TiO 2 core and clad waveguides are studied, and new materials information on amorphous sputtered TiO2 are reported. As integration with such waveguides could open opportunities for novel athermal lasers, some passively athermal designs and designs with integrated athermal wavelength references are presented which show the merit of an integrated approach.

As much process development was required to bring all of the device demonstrations presented in this dissertation to fruition, key process developments are highlighted and explained in detail to assist in any similar future developments.

Finally, the vision of heterogeneous integration as an enabler for ultra-broadband photonic integrated circuits beyond existing InP/Si photonic integrated circuits is presented as future work.

Physical Description:
1 online resource (175 pages)
Format:
Text
Collection(s):
UCSB electronic theses and dissertations
ARK:
ark:/48907/f3qr4v8b
ISBN:
9781321349153
Catalog System Number:
990045116710203776
Rights:
Inc.icon only.dark In Copyright
Copyright Holder:
Jock Bovington
File Description
Access: Public access
Bovington_ucsb_0035D_12314.pdf pdf (Portable Document Format)